S3A-DVK

S3A-DVK

S3A-DVK

这里把系统功能分成两部分：现场级控制、监控级控制。现场级控制完成2.1所述的功能1），其余功能由监控级完成。控制系统的网络拓扑结构如下图二：


  现场级的控制必须是可靠、实时的。在现场级的控制器中，PLC以其优良的性能、多样的可选系列和较好的性能价格比，在当今控制领域占了主导地位。所以，在本系统中现场级控制器选用PLC.
  监控级的任务由工控机通过组态软件来实现。远程监控任务由工控机实现，这样可以建立友好的人机界面，便于操作。使用组态软件能方便的进行系统变量的组态，易于开发人机界面，缩短项目的开发周期。

3．系统的功能实现
3．1 现场级控制功能的实现
  现场控制器选用GE公司的90-30系列PLC，同时它也为上位机提供现场的数据信息。通过以太网模块支持以太网通信，同时也支持RS232和RS485；具有浮点运算协处理器，能进行浮点运算；内置PID功能模块。
  所有回路采用PID控制。其中，液化冷冻工段为三个串级控制，用神经网络进行在线辨识，动态整定控制参数。

3．2 监控级控制功能的实现
  在总控制台，有两台互相备份的工控机，通过以太网对整个生产线进行实时监控。

Applied Materials 0020-04277 Flange

Applied Materials Cover 0200-40112-B

Applied Ceramics RING, QUARTZ SHADOW MXP, 0200-10176

Fine Series Stainless Steel Valve KC-FUB-71-19.05?-CJN

FURON 3 WAY VALVE 3/8 FLR ULTRA PURE Model UPM3-686

Entegris 1" PFA Hand Valve, KC-HFM-16F

Allen-Bradley Feed Through Interface Module KC-1492-IFM

APPLIED CERAMICS COLLAR, 200MM WIDER, 91-01765A 

APPLIED MATERIALS PLATEN 5" OD, 01-82622-00

Applied Materials 0020-81224 ARC Chamber

ONEAC FT1115 MRC ECLIPSE STAR 120V 12A AC-POWER SUPPLY

Emoteq Motor / Brake Encoder, QB02300-T04-HBE

Applied Materials 0040-9529

Shumacher I/O Controller Board 1730-3009


Leitz Wetzlar PL Fluotar 20x/0.45 567012

Leica ∞/- PL Fluotar optics 10x/0.25 567010

WATLOW Heater Imersion 5KW, 220v, Z6643

KLA Instruments 81B Assembly 710-659465-20

LAM, Coupling Leveling Ring, 853-210621-308

BALDOR Assy PUMP Motor W/viton 34H609W315G1

NEC 10.5" LCD Display NL6448BC33-59

PALL Fairy Ring Filter KC-GDF6406E

WARRENDER PVDF WET END, WE5002/ICS

MKS MANOMETER, TYPE 128, 128AA-00010B

Humphrey Solenoid Bank ST053101CJ-02
3 way/port valve

Allied Motion / Emoteq Leadscrew Assy, E3-1000-250-I 

FRABA ABSOLUTE ANGLE ENCODER 5813-4096-FBA1D?P03PG

Eurotherm AC Servo Motor, PGH07

BIORAD 8" Cassette, QS600, 013-5363-3

MKS MANOMETER, 0-10, 1/4 VCR, 124AA

EUROTHERM AMPSTACK, 70 AMP, 208 AC, AS-1

TIMNTA INPUT FILTER 3L+N+E, FMAD-0937-8010

EUROTHERM CONTROLLER, 461082

NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER

Futurestar FLOWMETER 5 GPM 1/2" Anolog Odyssey

Master Interface PCB w/optional Arcom 123626

Lambda LND X 152 12-15 Volt Regulated Power Supply 2.5A

APPLIED MATERIALS QUARTZ COVER 125mm POLY, 0200-10044

APPLIED MATERIALS Ring, top, 125 mm flat, 0200-00157

COORS Tek, SEMI WAFER. CEL 8.62, 41120-87756-010

Entegris Replacement element kit and wire guards 213-75

Entegris 3/4" PFA Hand Valve KC-201-41-01

BALDOR Industrial Motor MI6B 91751373-03

AMD Liquid Conductivity Assy. FT811-05-001 Rev. A

Applied Materials 0020-82818 APERTURE PLATE - AMI

Applied Materials 0020-86734 CLAMP, FILAMENT L/H

Applied Materials 0020-86733 CLAMP, FILAMENT R/H

Applied Materials 0020-31147

KLA Instruments KLA R1F Assembly 710-652840-20 Rev E1

Absolute Filter Assembly 2T-39516093-Z28?5

Absolute Filter Assembly 2T-69516093-Z28?4

VARITRONICS LABEL AND SIGN MAKER

Applied Materials Shield, Lower, 8", 0200-25077

Applied Materials Ring, Quartz, Pedestal, 0200-09217

TESTO MODEL 490 CALIBRATOR

LEYBOLD STRAIGHT THRU VALVE, 29923

LEYBOLD TR ANGLE VALVE, WITH ACTUATOR, 29823

LEYBOLD INLINE VALVE, VIP-025

Air Products Cable Cabinet Display 2103-0395

MOTOR SERVO W/US DIGITAL ENCODER THERM BHO2302-B11HE

BALLUFF LINEAR TRANSDUCER 305MM, BTL-S-P1-M0305-?P-KA05

Applied Materials 0020-98947 ELECTRODE, EH1 (SIC) - AMI

Applied Materials 0040-97144 STRAP CONNECTOR F.G.

YASKAWA AC BRUSHLESS MOTOR SERVO, SGMP-01U314CM

EMOTEQ BRUSHLESS DC SERVO MOTOR HS01001-A02-HGE

YASKAWA BRUSHLESS AC SERVO MOTOR, SGMP-01U314CM

FLUOROWARE PNEUMATIC MANIFOLD VALVE, 1/2", 710-416X2

ION SYSTEMS FLOW BAR CONTROLLER, 100VAC, 1/4 A

LAM PC Assembly 28-8875-037

LAM/ONTRAK Power Supply 40-0075-007

KOBOLD INSTRUMENTS FLOWMETER, SV-10

CTE CHEM TEC / SEMITOOL ANALOG FLOWMETER, 

Flowline Level Transmitter KC-LA15-5001

Semittol Optical Motor Encoder W/Brake

Semitool / Hathaway Motor Encoder W/Brake

APPLIED MATERIALS INC. LINER, SIDE, P19500 AMI

LAM ASSEMBLY GAP HEATING

RTS SPARES LLC ASSEMBLY. SHUTTER, A65

LAM PLATE, BAFFLE, LOWER, 8.3 (4428)

APPLIED MATERIALS COVER, QUARTZ 6" POLY, 0200-00043

DAIFUKU CO., LTD UNIT (S/R) YAGI OPTI, TRANSMIT

Entegris 2 WAY VALVE 3/8 X 1/4 ORIFICE 201-87-01

APPLIED MATERIALSAPERTU?RE, SILICON CARBIDE, EHO AMI 

POLY FLOW ENGINEERING MOTOR, GEAR, 3RPM, 1/50TH HP

AMETEK GAS INDICATING PRESSURE SWITCH IPS-200-LA

LAM 9600 Ceramic Consumables Rings

Applied Materials 0010-99166 MOVING CLIP ASSEMBLY

SCANDIALOGIC CONTROLLER, SCM750-1

SEMITOOL DIGITAL FLOWMETER FT0-4A1YS-LHA-1

Pacific Scientific Motor STF3624-5604-61?-56C

Hayward Actuator for drain Valves KC-PHS15

Applied Ceramics RING XL CLAMP SILICON, 91-01394A

Applied Ceramics VALVE SLIT INSERT QUARTZ 91-01680A500

FLOWMETER 5-20 GPM 3/4 FLR ENDS 72056-85 

MILLIPORE .05 MICRON QUICK CHANGE FILTER, QCDZATXTH

Applied Materials 0020-82813 ELECTRODE, APERTURE, EHO- 

Ultrasonic Ranging Proximity Sensor RPS 300

MILLIPORE WAFERGARD T-LINE GAS FILTER WGGB 12S02

PARKER REGULATOR BACK PRESSURE, BR-3-1168-2

AUTOMOTION MOTOR CONTROLLER ALC1500 MAGNUM

CUTLER-HAMMER INDUSTRIAL CIRCUIT BREAKER, EHD3020L

PARKER REGULATOR DI 0-60PSI 1/2 FNTP PTFE, PR-3-1118-2 

Integrated Power Designs Power Supply SRW-115 4005

DATA INSTRUMENTS DIGITAL FLOWMETER, 410500-9022/AFL?AS

NET MERCURY VALVE, PNEUMATIC ACTUATED- GAS

TOKYO ELECTRON SENSOR, ATM PS-10V 760 TORR, TEF

Sensor Technics Pressure Transducer 839-607828/SQ00?503

AP Tech Regulator AP1910SM/889-60?6950

MKS Manometer ABS 124AA-00100BB

Proportion Air PA 70905-27

MAC SOLENOID VALVE 3-WAY 20 STAGE CIRCUIT BAR L 202

Lambda 500W Power Supply FE050048-RA

Integrated Power Designs Power Supply REL-110-4006

Applied Materials 0020-82821

Applied Materials 0020-83583 SHIELD GUIDE TUBE 9500XR 

SENSARRAY 6" TEST WAFER PART 1501B-6-0001 

MAGNETEK LOADER, 10-349222-01

Futurestar Rotameter-Flowm?eter

Air Products N2 Trickle Purge Plumbing 216730

Control Concepts AC Noise Filter KC-IE-110

Applied Materials, ESC ASSEMBLY 125 MM, 0090-00091

Setra Pressure Transducer 2251100PGD41106

APPLIED MATERIALS SHADOW RING 0200-00156

NT INTERNATIONAL FLOW THRU PRESSURE TRANSDUCER

ASTI Flow Sensor 20 L/min, 3/4 FLR

Entegris 4/2" PFA Hand Valve 201-42-01

APPLIED MATERIALS SCREEN SLIDE ENTRY 9500XR - AMI

DNS ELECTRONICS ARM, 1H (2) - 80A- SCRUBBER

Intelligent Motion Systems (IMS) Microstepper and Index

Pentagon Tech Pedestal, Quartz, Pinless, Q15-0217

BIMBA MOTOR ASSEMBLY WITH HIGH TORQUE PLATING 0G70-S YG

Arcom, I/O Board, w/ standoffs AIM104-RELAY8/I?N8

Air Products AP2 LCD Display 809-607057

Tescom Pressure Regulator 44-2262-242-010

LFE INSTRUMENTS TEMPERATURE CONTROLLER 955241C-1190

Flextech, Cabinet Controller, 2103-0391

EUROTHERM DRIVE, B5261101BZ

Entegris 1/4" Auto valve w/check valve KC-202-69-01

APPLIED MATERIALS DC POWER SUPPLY, 01-81913-00

Saint Gobain Door Seal 480150091

AP2 Solenoid Bank 16V VV3Q11-ULB97019?3-16

Air Products Solenoid Digi. output board 809-607699

NT INTERNATIONAL ACID TRANSDUCER 1/2 FLR 0-60PSI

NT INTERNATIONAL PRESSURE TRANSDUCER FLOW THRU 3/4"

SMC APX16-Point Solenoid Bank 13V VV3Q11-ULB97019?4-13

SMC APX16-Point Solenoid Bank 10V VV3Q11-ULB97019?4-10

Granville-Phill?ips 275 Convectron Gauge For N2

MRC PCB, STEPCONTI/F, 884-55-000

Cable, Sensor, PT-100 85939

Saint Gobain Door Seal 480150089

Nikon PCB 4S018-210A

APPLIED MATERIALS PEDESTAL ASSEMBLY, 0010-09574

Cutler Hammer Industrial Circuit Breaker

Yaskawa Servo Motor, SG25TA-PE01A1

ASTI Flow Sensor 10 L/min, 1/2 FLR

Blue White Flowmeter, 0.2-2.0 gpm, Model F-500

Futurestar Odyssey Flowmeter 1 pm, 1/4 FLR

Futurestar Odyssey Flowmeter 1.75-5 lpm, 3/8 FLR

Futurestar Odyssey Flowmeter 5-250cc, 1/4 FLR

Yaskawa AC Servo Motor, Brushless with Brake

MKS INSTRUMENTS BARATRON, 1 TORR, 370HA

EMOTEQ CORP MOTOR ASSY PADDLE ACTUATING HS01001-A02-HGE

PATLITE SIGNAL TOWER, SL-402V

APPLIED CERAMICS, CERAMIC PLATE, 200MM, 716-028721-281

Cherry Electric exhaust vane switch 1491-3144

ASYS CONTROLLER, 10052885

FURON 1/2", 2 way Valve, DIBPOL8PC

FURON OMNISEAL 3/16" X 12.375" 70887-23

INSERT, INNER, MULTI-CHARGER/B?EAM TRAP MULTI-CHARGED 

HATHAWAY/EMOTEQ MOTOR LIFT/TILT, BH02301A F04HBE 

Micronix, I/0 board, PV-1648 Rev.3

Arcom, I/0 board, AIM104-ANALOG-I?/O

Air Products Comm. Controller board 287-607240

WESCO DISCONNECT SWITCH, NZM7-200-NA

Yaskawa AC Servo Motor, SGMP-01U314M

BIORAD 5" Cassette, QS600, 013-5363-1

APPLIED MATERIALS FINGER LONG HOLLOW GRIPPER -AMI (SLO

FURON 1/2", 2 way Valve, WB-2W8P-C

LEYBOLD STRAIGHT THRU VALVE, 428902

Air Products LCD Display 1730-7203

AP200 Shuttle adaptor kit, AP20-K-250

APPLIED MATERIALS PCB, SIGNAL CONDITION, ASSEMBLY

APPLIED MATERIALS ARC CHAMBER P19500

LAM RING, CLAMP-UPPER ELECTRODE

Trebor Model 85 Surge Suppressor

Finish Thompson / FTI Vertical Mag Drive VKC80VST336

Finish Thompson / FTI Vertical Mag Drive VKC80VST348

APPLIED MATERIALS INC. VANE, (MRS)P19500 AMI

Speedfam Load Cup

Lambda Power Supply, 500W, 24 VDC, FE050024RA

Applied Materials Gas Distribution Plate

DNS ELECTRONICS ARM, IH (2)- 80A SCRUBBER

OMRON CAPACITIVE PROXIMITY SWITCH, E2K-C25MF1

Applied Materials 0020-82550 HOLDER (MRS) P19500

SMC VALVE SHUTTLE CAM PUMP F25 KT-PA2-38

Semitool OPTICAL BOARD ASSEMBLY 16730-01

APPLIED MATERIALS INC. HOLDER (MRS) P19500 

Akrion Steag Valve PVDF610/15/D 7205A1 410200

APPLIED MATERIALS COVERING PIPE, 0020-0930

DNA CERAMIC IH ARM L=110MM 2-F3-31399

DAIFUKU MOTOR, CONV. ORIEN. TRAVEL BODY

Watlow Din-A-Mite DB2C-2060-C050

Yaskawa Digital AC Servo Drive

Lambda Power Supply SC150U03

Lee ATMI Micropump LPVX0505600CA

Applied Materials 0020-81482

Applied Materials 0020-82822

TRIPP LITE UPS System SMARTINT700

ATMOS Air Handling Filter 2FM-22

Clean Room Products Air Handling Filter U3030A00ADACACA

Parker Motor MPC 1140X

Harowe Resolver 31BRCX-500-B1

Pacific Scientific Motor R63FSSA-HS-SS-N?V-04

POLYPURE BATH

SENSOR, SOG FLOW 3x2 N.C. ST215A

DYTEC VALVE, DUMP RINSER, QDV-400-PVDF-V

SMART UPS 1000VA BATTERY BACKUP

APPLIED MATERIALS HEATER BAND FOR TMS KIT, 1410-01124

DWYER PHOTOHELIC GUAGE, KC-3003MR

APPLIED MATERIALS SHOWER HEAD,5B PUTTER ETCH 0020-09933

MIKRO ELEKTRONIK M34, M-Module, 04M034-00

BALZERS ROLLE COUPLING, BB180942-T

EIT SENSOR STIK, 0-25 PPM, SERIES 4500

DELCO BATTERY BACK-UP, RST31

Circuit Board DAMPER CD BG4-8615

Circuit Board M-POS (CONVERTER) BG8-3326 BH8-1970-01

Circuit Board CDIF BG4-6631 BH8-1823 BG8-2676

DAIFUKU CO. LTD. BOARD (TFE) DAIFUKU P.C.-3419B

EARTH LEAKAGE BREAKER ASSEMBLY #5, 

Circuit Board LIBRARY CONTROL PCB BG4-8193

HRD SENSOR PCB BG4-6583

CIRCUIT BOARD VEDZ-177 COMBX

JENCONS VAC SEAL

VARIAN TYPE 572 IONIZATION GAUGE, K7360301

Applied Materials 0020-04076 

LAM ENCODER ASSEMBLY, MOTOR STEPPER ARM DRIVE

EDWARDS SERIES 1 EXHAUST MODULE

VARIAN ANGLE VALVE, L6281-301

VARIAN ANGLE VALVE, L6281303

Tripp-Lite Power Supply System OMINSMART 700

Applied Materials 0020-25662 SHIELD, CLAMP, SCRWLES- CO

Humphrey Solenoid Bank ST022601CJ-01
3 way/port

LAM PC Assembly 28-8875-012

APPLIED MATERIALS INSERT PINS, SILICON,125 MM,0200-3671

Pepperl+Fuchs Dual Discrete Signal Isolator Switch EX2

LEYBOLD POWER SUPPLY, 100/250

Ontrak Extender Arm Bracket 13-8800-047-02

Swagelok Bellows valve NC ACTUATOR SS-8BK-VCR SS-6BK-1C

Dwyer CFH Flow meter 300PSIG Max

SWAGELOK VALVE 2 WAY 1/4 VCR SS-43GVCR4-1466

Futurestar Fiberoptic Sensor Flowmeter 400-003-80

CONTEMPORARY CONTROLS STANDARD NETWORK CARD SB871660-10

VALVE, AIR OPERATED RK-AOV

MRC Eclipse Receiver Remote Control Board, 883-87-000

METRON TECHNOLOGY, THERM-X RODS 0641-0767-02 TYPE R

USHIO SUPER HIGH PRESSURE MERCURY LAMP USH-350DP

ZIEHL-ABEGG ELECTRONIC SPEED CONTROLLER, PAE10E-M

GasFlo Products, Inc. PT SERIES CGA PT-AP-724SS-4TS

GasFlo Products, Inc. PT SERIES CGA PT-AP-638SS-4TS

Idec 24 VDC Power Supply (CDUs) PS5R-D24

MICRORAM 48V MOTOR AMPLIFIER, 208718-1

DAIFUKU BOARD (MCP) DAIFUKU P.C.

Malema Flow Switch M60-6T-SS-SP

Patlite Light Tower WM-302T

SUNX Wafer Sensor M-826

LAM SERVO MOTOR, 853-013720-608

Baldor 2 HP Motor VM555

Flanders Air Handling Filter

Flanders Air Handling Filter

LAM ASSY, VACUUM SWITCH, 100 TORR 853-017480-002